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Formation of textured thin 3D ferromagnetic metal films with different crystallographic orientation and microstructure by dc-sputtering

Keywords:

Y.V. Nikulin – Researcher, Saratov branch of the Kotel’nikov Institute of Radio Engineering and Electronics Russian Academy of Sciences
A.S. Dzhumaliev – Ph.D. (Phys.-Math.), Leading Researcher Scientist, Saratov branch of the Kotel’nikov Institute of Radio Engineering and Electronics Russian Academy of Sciences
Y.A. Filimonov – Dr. Sc. (Phys.-Math.), Professor, Director, Saratov branch of the Kotel’nikov Institute of Radio Engineering and Electronics Russian Academy of Sciences


Influence of gas pressure and substrate bias voltage on crystal structure, crystallographic orientation and microstructure of textured thin 3D ferromagnetic metal films produced by dc-sputtering at room temperature are investigated.
References:
  1. Yi J.B., Zhou Y.Z., Ding J. et al. An investigation of structure, magnetic properties and magnetoresistance of Ni films prepared by sputtering // JMMM. 2004. V. 284. P. 303.

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