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Noncontact method of measuring the conductivity of thin films

Keywords:

B.D. Zaitsev – Dr.Sc. (Phys.-Math.), Head of Laboratory, Kotelnikov IRE RAS (Saratov Branch) A.A. Teplykh – Ph.D. (Phys.-Math.), Senior Researcher, Kotelnikov IRE RAS (Saratov Branch) A.M. Shihabudinov – Ph.D. (Phys.-Math.), Researcher, Kotelnikov IRE RAS (Saratov Branch). E-mail: alex-sheih@ya.ru I.E. Kuznetsova – Dr.Sc. (Phys.-Math.), Leading Researcher, Kotelnikov IRE RAS


The non-contact method of measuring the conductivity of thin films by means of delay lines SH0 waves made on the basis of Y-cut lithium niobate plate is developed. It has been found that at the location above the delay line between the interdigital transducer (IDT) of the dielectric plate with thin conductive film phase of the output signal substantially changes, the degree of change decreases with increasing width of the gap between them. The conductivity of the studied films varied from 1 S to 1 µS.
References:

 

  1. Kuznetsova I.E., Zaitsev B.D., Anisimkin V.I., Teplykh A.A., Shikhabudinov A.M., Kolesov V.V., Yakunin V.G. Noncontact determination of thin films conductance by the SH0 plate acoustic waves // Journal of Applied Physics. 2014. V. 115. №4. 044504.
  2. Borodina I.A., Zaitsev B.D. Kuznetsova I.E. Acoustic Waves in a Structure Containing Two Piezoelectric Plates Separated by an Air (Vacuum) Gap // Trans. on Ultrason., Ferroel. and Freq. Control. 2013. V. 60. №12. P. 2677–2681.

 

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